Deposition of functional thin films by plasma processes

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Date

Authors

Sezemský, Petr

Publisher

Jihočeská univerzita

Keywords

plasma discharge, plasma diagnostics, surface diagnostics, magnetron sputtering, indium tin oxide, ITO, electrically conductive transparent oxide, optical fibre

URI

https://dspace.jcu.cz/handle/20.500.14390/33994

Collections

Přírodovědecká fakulta